Vacuum resistant fibre sensor heads

For applications in cleanest and hot environments the vaccuum resistant fibers and connecting flanges provide long operational lifetime and vaccuum integrity.

• Leakage rate of 1x10-10 Pa*m3/s max
• Heat resistance up to 200°C
• Detergent resistant fluororesin or stainless steel fiber sheath

For the detection of wafers in non-vacuum environments see E32 Special application.